Abstract: Considering the R&D competition factors, an evolutionary game model of industry-university-institute cooperation was built to analyze the decision-making interactive behavior of the players, system equilibrium and evolutionary path. Then the impact of the influencing factors change on the evolutionary stable strategy (ESS) was explored through model analysis and numerical simulation. Results indicate that reasonable cost sharing mechanism and fair income distribution system are good for the system to evolve towards industry-university-institute cooperation, and the R&D competition factors have a remarkable effect on equilibrium results and the probability of cooperation. Finally, some suggestions are put forward for promoting the industry-university-research cooperation.