Abstract: To reduce the effect of hysteresis of piezoceramic actuator to the accuracy of the nano positioning stage, inverse Preisach model is used to compensate the hysteresis nonlinearity and an adaptive sliding mode controller is designed to cancel the remaining hysteresis, uncertainty of the model, and other disturbances. Simulation results illustrate that the proposed control strategy improves the tracking accuracy of the system and is more robust compared with the normal sliding controller and PID controller with compensation of the inverse Preisach model.