微石英音叉电学参数的有限元分析

Finite Element Analysis of the Electrical Parameters of Micro Quartz Tuning Fork

  • 摘要: 以U形石英音叉为例,用耦合电压自由度的方式模拟电极,提出了石英音叉的静态集总电容模型,用有限元分析中的静态分析方法计算了静态电容参数.通过对电极作短路和开路处理,分别用模态分析和谐波响应分析方法计算了石英音叉的本征频率,两种分析计算结果相同.根据本征频率计算了石英音叉的动态等效电路参数,计算值在实测值的离散范围内.最后综合运用模态分析、谐波响应分析方法计算了石英音叉传感器的电压和电荷灵敏度,可为设计传感器放大电路提供必要的参考.

     

    Abstract: Taking U shape tuning fork as an example and by simulating electrode through coupling voltage freedom, the static lumped capacitance model of quartz tuning forks is presented. Static capacitance parameters are then calculated by means of the static analytic method of finite element analysis. By treating the electrodes as open circuits and short circuits, and using the modal and harmonic analytic methods respectively, inherent frequencies of tuning fork are computed, and the results from the two methods are seen to be coincident. Based on the inherent frequencies the dynamic equivalent circuit parameters are calculated and the result is within the discrete range of experimental values. Finaly, through modal and harmonic analysis, the voltage and charge sensitivity of quartz tuning fork sensors are calculated, which provide a necessary reference for the amplifier design of sensors.

     

/

返回文章
返回
Baidu
map