Micro-Scale Motion Precision Simulation Method for a New-Type 6-DOF Micro-Manipulation Robot

A new 6-DOF micro-manipulation robot based on 3-PPTTRS parallel mechanisms in combination with flexure hinges is proposed. The design principle of the mechanism is introduced, and the kinematics analysis method based on differentiation is used to get the (inverse) kinematics equations. Then a micro-scale motion precision simulation method is proposed according to finite element analysis (FEA), and the prediction of robot's motion precision in design phase is realized. The simulation result indicates that the 6-DOF micro-manipulation robot can meet the design specification.